作者单位
摘要
1 华中科技大学 武汉光电国家研究中心, 武汉 430074
2 上海安湃芯研科技有限公司, 上海 201803
高速电光调制器是宽带光通信网络和微波光子系统中的关键元器件之一。相对于体材料铌酸锂而言, 薄膜铌酸锂材料由于其较强的光场限制能力, 在构建小尺寸、宽带、低半波电压的高性能电光调制芯片上有独特的优势。文章基于薄膜铌酸锂材料研制了一种3dB带宽不低于50GHz的电光调制芯片, 并采用光纤与波导水平端面耦合的光学封装方案和基于1.85mm同轴接头的射频封装方案, 实现了全封装的薄膜铌酸锂电光调制器。测量结果表明, 封装后器件的光学插入损耗小于等于5dB, 3dB带宽大于等于40GHz, 射频半波电压小于等于3V@1GHz。
微波光子学 薄膜铌酸锂 电光调制器 microwave photonics thin-film lithium niobate electro-optic modulators 
半导体光电
2022, 43(1): 95
Author Affiliations
Abstract
1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
2 e-mail: huangqz@mail.hust.edu.cn
3 e-mail: jsxia@hust.edu.cn
We have developed a cost-effective and highly compact 100-Gb/s coarse wavelength division multiplexing (CWDM) transmitter optical subassembly (TOSA) using lens-free hybrid integration. To achieve large alignment tolerances, distributed feedback laser diodes (DFB-LDs) are butt-coupled to a four-channel silica-based planar lightwave circuit (PLC) arrayed waveguide grating, with the silicon sub-mounts and PLC adhesively bonded. Then, a flexible printed circuit is employed to connect the internal DFB-LDs and the exterior of the TOSA package for radiofrequency signal transmission, eliminating the expensive ceramic feed-through. The packaged CWDM TOSA, which is 15.8 mm×7.0 mm×6.0 mm in size, shows a side-mode suppression ratio of >40 dB, a 3 dB bandwidth of >18 GHz, and error-free transmission with an average optical output power of >0 dBm and dynamic extinction ratio of >4.0 dB at 25.78125 Gb/s over a 10 km single-mode fiber for all four lanes.
Photonics Research
2018, 6(11): 11001067
Author Affiliations
Abstract
1 Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
2 e-mail: huangqz@mail.hust.edu.cn
3 e-mail: jsxia@hust.edu.cn
We have designed and realized an athermal 4-channel wavelength (de-)multiplexer in silicon nitride (SiN). Minimized thermal sensitivity is achieved in a wide wavelength range by using wide and narrow waveguides with low and different thermal-optic coefficients in the two arms of Mach–Zehnder interferometers (MZIs). The SiN core layer and SiO2 cladding layers are deposited by a low-temperature plasma-enhanced chemical vapor deposition process. The fabricated MZI filter exhibits a thermal sensitivity within ±2.0 pm/°C in a wavelength range of 55 nm to near 1300 nm. Then, an athermal (de-)multiplexer based on cascaded MZIs has been demonstrated with a crosstalk 22 dB and a thermal sensitivity <4.8 pm/°C for all four channels, reduced by 77% compared to a conventional SiN (de-)multiplexer. Owing to the passive operation and compatibility with the CMOS backend process, our devices have potential applications in 3D integration of photonics and electronics.
Integrated optics devices Wavelength filtering devices 
Photonics Research
2018, 6(7): 07000686

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